Piezoelectric element and piezoelectric element application device
AssigneeSeiko Epson Corporation
InventorTetsuya Isshiki
Life of this patent
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Abstract
A piezoelectric element including a first electrode 60, a piezoelectric body layer 70, and a second electrode 80, in which a seed layer 65, which performs control such that the piezoelectric body layer 70 is preferentially oriented with respect to a specific crystal plane, is formed between the first electrode 60 and the piezoelectric body layer 70, and the seed layer 65 is formed from a composite oxide with a perovskite structure that includes at least Bi, Sr, Fe and Ti and an element ratio of Bi, Sr, Fe, and Ti in the seed layer satisfies the Formula (1) below. Bi:Sr:Fe:Ti=x·(1−y):y:1−z:z (1) (1.0≦x<1.3, 0<y<0.4, 0.4≦z≦0.6).
Claims5
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric body layer;
- and
- a second electrode, and
- a seed layer formed between the first electrode and the piezoelectric body layer, the seed layer controls the piezoelectric body layer to be preferentially oriented with respect to a specific crystal plane,
- wherein the seed layer is formed from a composite oxide with a perovskite structure that includes at least Bi, Sr, Fe and Ti, and
- an element ratio of Bi, Sr, Fe, and Ti in the seed layer satisfies the Formula (1) below:
- Bi:Sr:Fe:Ti=x·(1−y):y:1−z:z (1)
- (1.0≦x<1.3, 0<y<0.4, 0.4≦z≦0.6).
Dependencies are inferred from the claim text.