Metal oxide metal capacitor with slot vias

A capacitor comprising:

• a first electrode comprising:
• a plurality of first conductive lines;
• and
• at least one first via, wherein the first conductive lines on the same layer are parallel to each other and connected to a first periphery conductive line, and the first conductive lines aligned in adjacent layers are coupled to each other by the at least one first via;
• a second electrode aligned opposite to the first electrode, the second electrode comprising:
• a plurality of second conductive lines;
• and
• a plurality of second vias, wherein the second conductive lines on the same layer are parallel to each other and connected to a second periphery conductive line, and the second conductive lines aligned in adjacent layers are coupled to each other by the plurality of second vias, wherein one of the at least one first via overlaps with at least two of the plurality of second vias directly connected to a same second conductive line of the plurality of second conductive lines across the plurality of first conductive lines and the plurality of second conductive lines on a same layer;
• and
• at least one oxide layer formed between the first electrode and the second electrode.

A capacitor comprising:

• a first electrode comprising:
• a first periphery conductive line extending in a Y-direction;
• a plurality of first conductive lines connected to the first periphery conductive line, the each first conductive line of the plurality of first conductive lines extending in an X-direction perpendicular to the Y-direction;
• at least one first via extending in a Z-direction perpendicular to the X-direction and the Y-direction;
• and
• at least one second via extending in the Z-direction, wherein aligned first conductive lines adjacent to each other in the Z-direction are coupled by the at least one first via and the at least one second via, wherein the at least one first via has a first length in the X-direction, and the at least one second via has a second length in the X-direction different from the first length;
• a second electrode aligned opposite to the first electrode, the second electrode comprising:
• a second periphery conductive line extending in the Y-direction;
• a plurality of second conductive lines connected to the second periphery conductive line, wherein each second conductive line of the plurality of second conductive lines extends in the X-direction;
• and
• at least one third via extending in the Z-direction, wherein aligned second conductive lines adjacent to each other in the Z-direction are coupled by the at least one third via, and the at least one first via is staggered with respect to the at least one third via in the Y-direction;
• and
• at least one oxide layer formed between the first electrode and the second electrode.