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US 9,425,321 B2Granted
Thin-film transistor and process for manufacture of the thin-film transistor
AssigneeUniversitaet Stuttgart
InventorsMarcus Herrmann, Norbert Fruehauf
Life of this patent
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Abstract
A thin-film transistor includes an oxidic semiconductor channel, a metallic or oxidic gate, drain and source contacts and at least one barrier layer positioned between the oxidic semiconductor channel and the drain and source contacts to inhibit an exchange of oxygen between the oxidic semiconductor channel and the drain and source contacts.
Claims8
A thin-film transistor, comprising:
- an oxidic semiconductor channel;
- metallic or oxidic gate, drain and source contacts;
- and
- multiple barrier layers positioned between the oxidic semiconductor channel and the drain and source contacts to inhibit an exchange of oxygen between the oxidic semiconductor channel and the drain and source contacts;
- wherein one of the barrier layers is formed from a subtractively structured conductive layer in direct contact with the oxidic semiconductor channel;
- and
- wherein another of the barrier layers is formed of an electrical insulator comprising silicon oxide or silicon nitride.
4 more elements
An active matrix display formed with thin-film transistors, the thin-film transistors comprising:
- an oxidic semiconductor channel;
- metallic or oxidic gate, drain and source contacts;
- and
- multiple barrier layers positioned between the oxidic semiconductor channel and the drain and source contacts to inhibit an exchange of oxygen between the oxidic semiconductor channel and the drain and source contacts;
- wherein one of the barrier layers is formed from a subtractively structured conductive layer in direct contact with the oxidic semiconductor channel and operates as an electrical bridge between the oxidic semiconductor channel and the drain and source contacts;
- and
- wherein another of the barrier layers is formed of an electrical insulator comprising silicon oxide or silicon nitride.
4 more elements
Dependencies are inferred from the claim text.