Array substrate structure and contact structure
AssigneeInnolux Corporation
InventorsYu-Tsung Liu, Chung-Wen Yen
Life of this patent
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Abstract
A contact structure is provided, including a substrate, an active layer, an inter-layer dielectric (ILD) layer, a contact opening, and a conductive layer. The active layer is disposed over the substrate, and the insulating layer is disposed over the active layer; an inter-layer dielectric (ILD) layer over the insulating layer. The contact opening penetrates a portion of the ILD layer and the insulating layer to expose a portion of the active layer, wherein the contact opening includes a first recess portion, and the first recess portion is defined by a bottom surface of the ILD layer, a sidewall of the insulating layer and a top surface of the active layer. The conductive layer is in the contact opening and is electrically connected to the active layer.
Claims12
A contact structure comprising:
- a substrate;
- an active layer over the substrate;
- an insulating layer over the active layer;
- an inter-layer dielectric (ILD) layer over the insulating layer;
- a contact opening penetrating a portion of the ILD layer and the insulating layer, exposing a portion of the active layer, wherein the contact opening comprises a first recess portion, wherein the first recess portion is defined by a surface of the ILD layer, a sidewall of the insulating layer, and a top surface of the active layer, and wherein the surface of the ILD layer makes an angle with the sidewall of the insulating layer which is not equal to 180 degrees;
- and
- a conductive layer in the contact opening, electrically connected to the active layer.
An array substrate structure comprising:
- a substrate;
- an active layer over a portion of the substrate;
- an insulating layer over the active layer;
- a first conductive layer over the insulating layer, being disposed over a portion of the active layer;
- an inter-layer dielectric (ILD) layer over the first conductive layer and the insulating layer;
- a contact opening penetrating a portion of the ILD layer and the insulating layer, exposing a portion of the active layer, wherein the contact opening comprises a first recess portion, wherein the first recess portion is defined by a surface of the ILD layer, a sidewall of the insulating layer and a top surface of the active layer, and wherein the sidewall of the ILD layer makes an angle with the sidewall of the insulating layer which is not equal to 180 degrees;
- and
- a second conductive layer in the contact opening, electrically connected to the active layer.
Dependencies are inferred from the claim text.