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US 9,425,252 B1Granted
Process for single diffusion break with simplified process
AssigneeGlobalfoundries Inc.
InventorsHui Zang, Bingwu Liu
Life of this patent
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Abstract
A method of forming a SDB including a protective layer or bilayer and the resulting device are provided. Embodiments include forming a SDB of oxide in a Si substrate; forming a nitride layer over the Si substrate; forming a photoresist over the SDB and a portion of the nitride layer; removing the nitride layer on opposite sides of the photoresist down to the Si substrate, leaving a portion of the nitride layer only under the photoresist; forming a gate above the SBD and the portion of the nitride layer.
Claims9
A method comprising:
- forming a single diffusion break (SDB) of oxide in a silicon (Si) substrate;
- forming a nitride layer directly on the Si substrate and on the SDB;
- forming an oxide layer over the nitride layer;
- forming a photoresist over the SDB, a portion of the nitride layer and a portion of the oxide layer;
- removing the nitride layer and the oxide layer on opposite sides of the photoresist down to the Si substrate, leaving a portion of the nitride layer and a portion of the oxide layer only under the photoresist;
- forming a gate above the SDB, the portion of the nitride layer;
- and the portion of the oxide layer.
4 more elements
A method comprising:
- forming a single diffusion break (SDB) of oxide in a silicon (Si) substrate;
- forming a nitride layer directly on the Si substrate and on the SDB;
- forming a photoresist layer on the nitride layer, the photoresist layer having an opening above the SDB and down to the nitride layer;
- forming a recess in the nitride layer through the opening;
- forming an oxide layer over the nitride layer and filling the recess;
- removing the nitride layer on opposite sides of the oxide layer down to the Si substrate, leaving a portion of the nitride layer only under the oxide layer;
- and
- forming a gate on the oxide layer over the SDB.
5 more elements
Dependencies are inferred from the claim text.