Very small pixel pitch focal plane array and method for manufacturing thereof
AssigneeDRS Network & Imaging Systems, LLC
InventorPradip Mitra
Life of this patent
Estimating the term…
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AssigneeDRS Network & Imaging Systems, LLC
InventorPradip Mitra
Estimating the term…
An imaging device includes a first semiconductor layer having a first surface and a second surface and a first photodetector having a first implanted region formed in the first semiconductor layer and a pad formed over the first implanted region. The imaging device also includes a readout circuit disposed over the first surface of the first semiconductor layer. The readout circuit has a plurality of contact plugs facing the first surface of the first semiconductor layer. The imaging device further includes a second semiconductor layer disposed below the second surface of the first semiconductor, a second photodetector having a second implanted region formed in the second semiconductor layer, and a metalized via extending through the first semiconductor layer and the second semiconductor layer and electrically connecting the second implanted region to a second of the contact plugs of the readout circuit.
An imaging device comprising:
Dependencies are inferred from the claim text.