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US 9,425,231 B2Granted
Image sensor and method for fabricating the same
AssigneeSK hynix Inc.
InventorsYeoun-Soo Kim, Il-Ho Song
Life of this patent
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Abstract
An image sensor includes: a first inter-layer dielectric layer formed over a front side of a substrate including photoelectric conversion regions; isolation structures each of which penetrates through the first inter-layer dielectric layer and has a portion buried in the substrate; first metal lines formed over the first inter-layer dielectric layer to correspond to the photoelectric conversion regions; and an optical filter and a light condenser formed over a back side of the substrate.
Claims11
A method for fabricating an image sensor, comprising:
- forming photoelectric conversion regions in a substrate in a first region, wherein the substrate includes the first region and a second region;
- forming a first inter-layer dielectric layer over a front side of the substrate in the first region;
- forming a first trench and a second trench in the first region and the second region, respectively, by etching the first inter-layer dielectric layer and the substrate in the first and the second regions, wherein the first trench and the second trench have different line widths and lengths, wherein the first trench is provided between the photoelectric conversion regions;
- forming a first isolation structure and a second isolation structure that gap-fill the first trench and the second trench, respectively;
- forming first metal lines over the first inter-layer dielectric layer in the first region to align with the photoelectric conversion regions;
- forming a second metal line over the first inter-layer dielectric layer in the second region to be coupled with the second isolation structure;
- and
- forming an optical filter and a light condenser over a back side of the substrate in the first region.
5 more elements
Dependencies are inferred from the claim text.