US 9,425,144 B2 · Metal fuse structure for improved programming capability

Abstract

Structure providing more reliable fuse blow location, and method of making the same. A vertical metal fuse blow structure has, prior to fuse blow, an intentionally damaged portion of the fuse conductor. The damaged portion helps the fuse blow in a known location, thereby decreasing the resistance variability in post-blow circuits. At the same time, prior to fuse blow, the fuse structure is able to operate normally. The damaged portion of the fuse conductor is made by forming an opening in a cap layer above a portion of the fuse conductor, and etching the fuse conductor. Preferably, the opening is aligned such that the damaged portion is on the top corner of the fuse conductor. A cavity can be formed in the insulator adjacent to the damaged fuse conductor. The damaged fuse structure having a cavity can be easily incorporated in a process of making integrated circuits having air gaps.

Claims15

Dependent claims

A pre-blow fuse structure comprising:

a first connection disposed within a first insulator layer;
a second connection disposed within a second insulator layer;
a conductor having a damaged portion, the conductor being disposed within a third insulator layer between the first connection within the first insulator layer and the second connection within the second insulator layer;
a dielectric cap layer between the third insulator layer and the second insulator layer;
and
a cavity within the third insulator layer adjacent to the conductor,
wherein the damaged portion is disposed adjacent to a first opening within the dielectric cap layer, and
wherein the second insulator layer is directly over the cavity.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/580,539Filed 23 Dec 2014 · division

Priority

17 Feb 2012

Published

US 2015/0137312 A121 May 2015

Granted

23 Aug 2016

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

H10W 20/493
Adaptable interconnections, e.g. fuses or antifuses: fuses, i.e. interconnections changeable from conductive to non-conductive
H01H 69/02
Apparatus or processes for the manufacture of emergency protective devices: manufacture of fuses
H01H 85/046
Characterised by the type: fuses formed as printed circuits
H10W 20/42
Characterised by their conductive parts: vias, e.g. via plugs

Metal fuse structure for improved programming capability

Life of this patent

Metal fuse structure for improved programming capability

Life of this patent

Abstract

Claims15