Light source device and semiconductor manufacturing apparatus including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsWook-Rae Kim, Hashimoto Kohei, Won-Don Joo, Kwang-Soo Kim, Byeong-Hwan Jeon, Sue-Jin Cho
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Abstract
Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.
Claims19
A light source device, comprising:
- a light-emitting lamp;
- a laser generator configured to generate and direct a laser beam to the light-emitting lamp;
- and
- a recycling optical element configured to redirect the laser beam to the light-emitting lamp,
- wherein the recycling optical element comprises at least one recycling mirror configured to reflect the laser beam to the light-emitting lamp, and a first recycling optical modulator configured to change the phase of the laser beam redirected to the light-emitting lamp, and
- wherein the laser beam redirected to the light-emitting lamp by the recycling optical element crosses the laser beam directed to the light-emitting lamp by the laser generator in the light-emitting lamp without generating an interference pattern.
A light source device, comprising:
- a lamp element comprising a light-emitting lamp;
- a hemispherical collecting mirror surrounding the light-emitting lamp;
- a laser generator configured to generate and direct a laser beam to the light-emitting lamp, the laser generator positioned outside the collecting mirror, wherein the laser beam directed to the light-emitting lamp has a first phase;
- a recycling optical element configured to redirect the laser beam to the light-emitting lamp, the recycling optical element located outside the collecting mirror;
- and
- a light-absorbing element configured to absorb the laser beam redirected to the light-emitting lamp by the recycling optical element,
- wherein the recycling optical element includes a recycling mirror configured to reflect the laser beam and a recycling optical modulator configured to change the phase of the laser beam having the first phase to a second phase different than the first phase, wherein the recycling optical modulator is positioned on a path of the laser beam reflected by the recycling mirror, and
- wherein the laser beam having the first phase crosses the laser beam having the second phase in the light-emitting lamp without generating an interference pattern due to the first and second phases of the laser beam.
A light source device, comprising:
- a light-emitting lamp;
- a laser generator configured to generate and direct a laser beam having a first phase to the light-emitting lamp;
- a collecting mirror configured to direct light generated by the light-emitting lamp in a plurality of directions;
- and
- a recycling optical element configured to redirect the laser beam to the light-emitting lamp, the recycling optical element including recycling mirrors configured to reflect the laser beam passing through the light-emitting lamp, and a first recycling optical modulator configured to change the phase of the laser beam reflected by the recycling mirrors to a random phase,
- wherein the phase of the laser beam redirected to the light-emitting lamp by the recycling optical element differs from the phase of the laser beam directed to the light-emitting lamp by the laser generator.
Dependencies are inferred from the claim text.