Systems and methods for improved radio frequency matching networks
AssigneeApplied Materials, Inc.
InventorsSuhail Anwar, Carl A. Sorensen, Jozef Kudela
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Abstract
Systems and methods are provided for matching the impedance of a load to an impedance of a power generator. Embodiments include a matching network with a dynamically configurable component assembly array couplable to the variable impedance load and the RF power generator, wherein the component assembly array includes one or more tune and load electrical components. The component assembly array is adapted to be configured for each recipe step, and at least one of the electrical components is a variable impedance component adjustable to reduce RF energy reflected from the variable impedance load for each recipe step. Numerous other aspects are provided.
Claims20
A system, comprising:
- a radio frequency (RF) power generator;
- a processing chamber adapted to process recipe steps and presenting variable impedance loads corresponding to different recipe steps;
- and
- a matching network coupled to the variable impedance load and the RF power generator, wherein the matching network includes a dynamically configurable component assembly array including one or more tune and load electrical components,
- wherein the component assembly array is adapted to be configured for each recipe step, and at least one of the electrical components is a variable impedance component adjustable to reduce RF energy reflected from the variable impedance load for each recipe step.
A method comprising:
- providing a dynamically configurable matching network including a configurable component assembly array having one or more tune and load electrical components;
- determining a load impedance for a recipe step;
- configuring the matching network by coupling selected components within the component assembly array into a selected topology and adjusting the impedance of one or more of the selected components;
- and
- executing the recipe step with the configured matching network.
A radio frequency (RF) matching network for matching RF energy output from an RF generator to a variable impedance load, the RF matching network comprising:
- a dynamically configurable component assembly array couplable to the variable impedance load and the RF power generator, wherein the component assembly array includes one or more tune and load electrical components,
- wherein the component assembly array is adapted to be configured for each recipe step, and at least one of the electrical components is a variable impedance component adjustable to reduce RF energy reflected from the variable impedance load for each recipe step.
Dependencies are inferred from the claim text.