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US 9,425,023 B2Granted
Ion generator and thermal electron emitter
AssigneeSumitomo Heavy Industries Ion Technology Co., Ltd.
InventorMasateru Sato
Life of this patent
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Abstract
An ion generator includes an arc chamber, a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron into the arc chamber, a thermal reflector with a cylindrical shape provided around the cathode in a radial direction and extending in the axial direction, and a narrow structure configured to narrow a width in the radial direction of a gap between the cathode and the thermal reflector at a given position in the axial direction.
Claims16
An ion generator, comprising:
- an arc chamber;
- a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron into the arc chamber;
- a thermal reflector with a cylindrical shape provided around the cathode in a radial direction and extending in the axial direction;
- and
- a narrow structure configured to narrow a width in the radial direction of a gap between the cathode and the thermal reflector at a predetermined position in the axial direction.
2 more elements
A thermal electron emitter for generating plasma in an arc chamber, comprising:
- a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron into the arc chamber;
- a thermal reflector with a cylindrical shape provided around the cathode in a radial direction and extending in the axial direction;
- and
- a narrow structure configured to narrow a width in the radial direction of a gap between the cathode and the thermal reflector at a predetermined position in the axial direction.
1 more element
Dependencies are inferred from the claim text.