MEMS infrared sensor including a plasmonic lens
AssigneeRobert Bosch GmbH
InventorsAshwin Samarao, Gary O'Brien, Ando Feyh, Gary Yama, Fabian Purkl
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Abstract
A portable thermal imaging system includes a portable housing configured to be carried by a user, a bolometer sensor assembly supported by the housing and including an array of thermal sensor elements and at least one plasmonic lens, a memory including program instructions, and a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements, assign each of the obtained signals with a respective color data associated with a temperature of a sensed object, and render the color data.
Claims16
A portable thermal imaging system comprising:
- a portable housing configured to be carried by a user;
- a bolometer sensor assembly supported by the housing and including an array of thermal sensor elements and at least one plasmonic lens;
- a memory including program instructions;
- a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to
- obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements,
- assign each of the obtained signals with a respective color data associated with a temperature of a sensed object, and
- render the color data;
- and
- an imaging subsystem including a display, the imaging subsystem operably connected to the processor, wherein the processor is further configured to execute the program instructions to render indicia of a field of view of the bolometer sensor assembly on the display, wherein the bolometer sensor assembly further comprises:
- a substrate having an upper surface supporting the array of thermal sensor elements;
- and
- a cap wafer supported by the substrate and including a cap layer spaced apart from the substrate, the cap layer supporting the at least one plasmonic lens.
A portable thermal imaging system comprising:
- a portable housing configured to be carried by a user;
- a bolometer sensor assembly supported by the housing, and including a substrate having an upper surface supporting an array of thermal sensor elements and a cap wafer directly supported by the upper surface and including a cap layer spaced apart from the substrate, the cap layer supporting at least one plasmonic lens;
- a memory including program instructions;
- and
- a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to
- obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements,
- assign each of the obtained signals with a respective color data associated with a temperature of a sensed object, and
- render the color data.
Dependencies are inferred from the claim text.