Single crystal production apparatus and single crystal production method having pedestal with grooves
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsAtsushi Iwasaki, Susumu Sonokawa, Shinobu Takeyasu
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AssigneeShin-Etsu Handotai Co., Ltd.
InventorsAtsushi Iwasaki, Susumu Sonokawa, Shinobu Takeyasu
Estimating the term…
A single crystal production apparatus using the Czochralski method, includes: a crucible for holding raw material melt; a pedestal that supports the crucible and can be moved upward and downward; a crucible rotating shaft for rotating the crucible via the pedestal; and a melt receiver that is disposed below the crucible and provided with a center sleeve surrounding the pedestal, wherein, on the outer periphery of the pedestal, two or more grooves for preventing the raw material melt leaking from the crucible from dripping are provided. The single crystal production apparatus and single crystal production method can reliably prevent melt from reaching a metal portion below the pedestal even when the raw material melt in the crucible flows to the outside of the crucible in an unexpected accident or the like and runs down along the pedestal and thereby prevent damage to the apparatus and the occurrence of an accident.
A single crystal production apparatus using a Czochralski method, the single crystal production apparatus comprising:
Dependencies are inferred from the claim text.