Pressure sensor

A pressure sensor comprising:

• a support section;
• a film section supported by the support section, being deformable, and including a first region located in a central part and a second region located in a peripheral part around the first region, material of the first region being different from material of the second region;
• and
• a strain sensing element provided on part of the second region and including:
• a first magnetic layer with a magnetization changing in response to deformation of the second region;
• a second magnetic layer;
• and
• an intermediate layer provided between the first magnetic layer and the second magnetic layer.

A pressure sensor comprising:

• a support section;
• a film section supported by the support section, being deformable, and including a first region located in a central part and a second region located in a peripheral part around the first region, Young's modulus of the first region being larger than Young's modulus of the second region;
• and
• a strain sensing element provided on part of the second region and including:
• a first magnetic layer with a magnetization changing in response to deformation of the second region;
• a second magnetic layer;
• and
• an intermediate layer provided between the first magnetic layer and the second magnetic layer.

A pressure sensor comprising:

• a support section;
• a film section supported by the support section, being deformable, and including a first region located in a central part and a second region located in a peripheral part around the first region, value of stress remaining in the first region being relatively more tensile than value of stress remaining in the second region;
• and
• a strain sensing element provided on part of the second region and including:
• a first magnetic layer with a magnetization changing in response to deformation of the second region;
• a second magnetic layer;
• and
• an intermediate layer provided between the first magnetic layer and the second magnetic layer.