Liquid ejecting head and manufacturing method of liquid ejecting head
AssigneeSeiko Epson Corporation
InventorsYoichi Naganuma, Eiju Hirai
Life of this patent
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Abstract
A liquid ejecting head includes a nozzle which ejects a liquid, a pressure chamber, a portion of which is partitioned by a flexible diaphragm and which communicates with the nozzle, a piezoelectric element which is laminated on an opposite side of the diaphragm from the pressure chamber and changes a pressure within the pressure chamber, and a reservoir which communicates with the pressure chamber, in which a valve mechanism is provided in a region which is distanced from a region in which the piezoelectric element of the diaphragm is laminated, and is configured to allow the liquid to flow from the reservoir side into the pressure chamber side while inhibiting the liquid from flowing out from the pressure chamber side to the reservoir side.
Claims5
A liquid ejecting head, comprising:
- a nozzle which ejects a liquid;
- a pressure chamber, a portion of which is partitioned by a flexible diaphragm and which communicates with the nozzle;
- an actuator which is laminated on the flexible diaphragm and changes a pressure within the pressure chamber;
- and
- a reservoir which communicates with the pressure chamber,
- wherein a valve mechanism is provided in a region which is distanced from a region in which the actuator of the diaphragm is laminated, and is configured to allow the liquid to flow from the reservoir side into the pressure chamber side while inhibiting the liquid from flowing out from the pressure chamber side to the reservoir side,
- wherein the valve mechanism is laminated over a surface of a pressure chamber forming substrate forming the pressure chamber.
A manufacturing method of a liquid ejecting head which includes
- a nozzle which ejects a liquid,
- a pressure chamber, a portion of which is partitioned by a flexible diaphragm and which communicates with the nozzle,
- an actuator which is laminated on an opposite side of the diaphragm from the pressure chamber and changes a pressure within the pressure chamber,
- a reservoir which communicates with the pressure chamber, and
- a valve mechanism which is provided in a region which is distanced from a region in which the actuator of the diaphragm is laminated, the method comprising:
- forming an opening in a region which is distanced from a region of the diaphragm in which the actuator is laminated;
- forming a valve receiving body in a region which overlaps the opening of the diaphragm in the reservoir side to interpose a thin film therebetween;
- and
- removing at least the thin film between the opening and the valve receiving body to form the valve mechanism which is laminated over a pressure chamber forming substrate forming the pressure chamber.
Dependencies are inferred from the claim text.