Substrate holder
AssigneeTel Nexx, Inc.
InventorsDaniel Goodman, Arthur Keigler, David G. Guarnaccia
Life of this patent
Estimating the term…
Abstract
A rotary chuck adapted to hold a substrate. The rotary chuck has a rotatable chuck portion and an edge grip having a movable grip member movably mounted to the rotatable chuck portion, the moveable grip member being substantially free moving so that rotation of the rotating chuck portion causes the moveable grip member to move in a plane substantially aligned with a surface of the substrate to engage the substrate in a engaged position. A resilient element is coupled to the moveable grip member, the resilient member biasing the grip member to a disengaged position.
Claims6
A rotary chuck configured to hold a substrate, the rotary chuck comprising:
- a rotatable chuck portion;
- an edge grip having a movable grip member movably mounted to the rotatable chuck portion, the movable grip member being substantially free moving;
- a pivot coupled to the rotatable chuck portion with an axis of rotation that is substantially aligned with an axis of the rotary chuck, the movable grip member coupled to the rotatable chuck portion and pivot such that rotation of the rotatable chuck portion causes the movable grip member to rotate on the axis of rotation of the pivot;
- and
- a resilient element coupled to the movable grip member, and the resilient member further coiled around the pivot such that when the rotary chuck is stationary, the resilient member causes the movable grip member to rotate to a disengaged position.
Dependencies are inferred from the claim text.