Integrated circuit system with tunable resistor and method of manufacture thereof
AssigneeAltera Corporation
InventorsQueennie Suan Imm Lim, Jeffrey T. Watt, ShuXian Chen
Life of this patent
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Abstract
An integrated circuit system, and a method of manufacture thereof, includes: an integrated circuit substrate; and a discretized tunable precision resistor having a total resistance including: a resistor body over the integrated circuit substrate, interconnects directly on the resistor body, metal taps directly on the interconnects and at opposing sides of the resistor body, and conductive metal strips over the interconnects, wherein the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.
Claims20
A method of manufacture of an integrated circuit system comprising:
- providing an integrated circuit substrate;
- and
- forming a discretized tunable precision resistor having a total resistance including:
- forming a resistor body over the integrated circuit substrate,
- forming interconnects directly on the resistor body,
- forming metal taps directly on the interconnects and at opposing sides of the resistor body, wherein only one of the metal taps is at each of the opposing sides of the resistor body, and
- forming conductive metal strips over the interconnects, wherein multiple of the conductive metal strips are at each of the opposing sides of the resistor body, the only one of the metal taps is directly under one of the multiple of the conductive metal strips, and the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.
A method of manufacture of an integrated circuit system comprising:
- providing an integrated circuit substrate;
- and
- forming a discretized tunable precision resistor having a total resistance including:
- forming a resistor body over the integrated circuit substrate,
- forming an insulation layer directly on the resistor body,
- forming interconnects partially through the insulation layer and directly on the resistor body,
- forming metal taps directly on the interconnects and at opposing sides of the resistor body, wherein only one of the metal taps is at each of the opposing sides of the resistor body, and
- forming conductive metal strips over the interconnects, wherein multiple of the conductive metal strips are at each of the opposing sides of the resistor body, the only one of the metal taps is directly under one of the multiple of the conductive metal strips, and the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.
An integrated circuit system comprising:
- an integrated circuit substrate;
- and
- a discretized tunable precision resistor having a total resistance including:
- a resistor body over the integrated circuit substrate,
- interconnects directly on the resistor body,
- metal taps directly on the interconnects and at opposing sides of the resistor body, wherein only one of the metal taps is at each of the opposing sides of the resistor body, and
- conductive metal strips over the interconnects, wherein multiple of the conductive metal strips are at each of the opposing sides of the resistor body, the only one of the metal taps is directly under one of the multiple of the conductive metal strips, and the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.
Dependencies are inferred from the claim text.