Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond
AssigneeUchicago Argonne, LLC
InventorsAnirudha V. Sumant, Sergey V. Baryshev, Sergey P. Antipov
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AssigneeUchicago Argonne, LLC
InventorsAnirudha V. Sumant, Sergey V. Baryshev, Sergey P. Antipov
Estimating the term…
A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 1012 to about 1014 emitting sites per cm2. A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.
A method of forming a field emitter, comprising:
A method of forming a photocathode, comprising:
A field emitter, comprising:
A photocathode, comprising:
Dependencies are inferred from the claim text.