Photoresist composition and method for forming a metal pattern
AssigneeSamsung Display Co., Ltd.
InventorsKi-Hyun Cho, Hoon Kang, Jae-Sung Kim, Dong-Min Kim, Seung-Ki Kim, Eun Jeagal
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AssigneeSamsung Display Co., Ltd.
InventorsKi-Hyun Cho, Hoon Kang, Jae-Sung Kim, Dong-Min Kim, Seung-Ki Kim, Eun Jeagal
Estimating the term…
A method of forming a metal pattern is disclosed. In the method, a metal layer is formed on a base substrate. A photoresist composition is coated on the metal layer to form a coating layer. The photoresist composition includes a binder resin, a photo-sensitizer and a mixed solvent including a first solvent, a second solvent having a higher volatility than the first solvent, and a third solvent having a higher volatility than the second solvent. The coating layer is exposed to light. The coating layer is partially removed to form a photoresist pattern. The metal layer is patterned by using the photoresist pattern as a mask.
A photoresist composition comprising:
A method of forming a metal pattern, the method comprising:
Dependencies are inferred from the claim text.