Reference line and bit line structure for 3D memory
AssigneeMacronix International Co., Ltd.
InventorsTeng-Hao Yeh, Chih-Wei Hu, Yu-Wei Jiang
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AssigneeMacronix International Co., Ltd.
InventorsTeng-Hao Yeh, Chih-Wei Hu, Yu-Wei Jiang
Estimating the term…
A 3D NAND flash memory includes even and odd stacks of conductive strips. Some of the conductive strips in the stacks are configured as word lines. Data storage structures are disposed on the sidewalls of the even and odd stacks. Active pillars include even and odd semiconductor films on the data storage structures connected at the bottom ends so that the semiconductor films can be thin films having a U-shaped current path. An even pad connected to the even semiconductor film and an odd pad connected to the odd semiconductor film are disposed over the even and odd stacks respectively. A segment of a reference line is connected to the even pad, and an inter-level connector is connected to the odd pad. A segment of a bit line comprises an extension contacting the inter-level connector.
A memory device, comprising:
A memory device, comprising:
A method of manufacturing a memory device, comprising:
Dependencies are inferred from the claim text.