# US 9,412,566 B2 · Methods and apparatus for depositing and/or etching material on a substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,412,566 B2 - Document ID: US9412566B2 - Status: Granted - Kind: B2 - Application number: 14/381,508 - Filed: 2013-02-27 - Published: 2015-01-08 - Granted: 2016-08-09 - Earliest claimed: 2012-02-29 - Assignees: Oxford Instruments Nanotechnology Tools Limited - Applicants: Oxford Instruments Nanotechnology Tools Limited - Inventors: Mark Edward McNie; Michael Joseph Cooke; Leslie Michael Lea - Web page: https://patentgrep.com/patent/US9412566B2 ## CPC - H01J 37/32926: {Software, data control or modelling} - C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} - C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} - G05B 19/418: Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] - H01J 37/32449: {Gas control, e.g. control of the gas flow} - H01J 37/32816: {Pressure} - H01J 37/32834: {Exhausting} - H01J 37/32917: {Plasma diagnostics} - H10P 50/00: Etching of wafers, substrates or parts of devices - H10P 50/244: {comprising alternated and repeated etching and passivation steps} - H10P 74/238: {comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement} - G05B 2219/34198: Electric and fluidic modules integrated on one substrate - H01J 2237/24564: Measurements of electric or magnetic variables, e.g. voltage, current, frequency - H01J 2237/24585: Other variables, e.g. energy, mass, velocity, time, temperature - H01J 2237/248: Components associated with the control of the tube - H01J 2237/3321: CVD [Chemical Vapor Deposition] - H01J 2237/334: Etching - H10P 74/203: {Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Methods are disclosed for depositing material onto and/or etching material from a substrate in a surface processing tool having a processing chamber, a controller and one or more devices for adjusting the process parameters within the chamber. The method comprises: the controller instructing the one or more devices according to a series of control steps, each control step specifying a defined set of process parameters that the one or more devices are instructed to implement, wherein at least one of the control steps comprises the controller instructing the one or more devices to implement a defined set of constant process parameters for the duration of the step, including at least a chamber pressure and gas flow rate through the chamber, which duration is less than the corresponding gas residence time (Tgr) of the processing chamber for the step. ## Claims ### Claim 1 A method for depositing material onto and etching material from a substrate in a surface processing tool having a processing chamber, a controller and one or more devices for adjusting process parameters within the chamber, the method comprising: instructing, using the controller, the one or more devices according to a series of control steps, each control step specifying a defined set of process parameters that the one or more devices are instructed to implement, wherein at least one of the control steps comprises: implementing, using the one or more devices, a defined set of constant process parameters for the duration of the step, wherein the process parameters comprise a chamber pressure and total gas flow rate through the chamber, wherein the duration of the step is less than the corresponding gas residence time (Tgr) of the processing chamber for the step such that there is insufficient time for the chamber to reach steady state conditions during the step, wherein: T gr = pV Q wherein: p is the chamber pressure in units of Pa; V is the volume of the processing chamber in units of m3; and Q is the total gas flow rate through the processing chamber in units of Pa·m3·s−1; and wherein a first sequential subset of one or more of the series of control steps constitutes a passivation process phase during which the processing parameters are selected for depositing a passivation layer on the substrate, and a second sequential subset of one or more of the series of control steps constitutes an etching process phase during which the processing parameters are selected for etching the substrate. ### Claim 2 (depends on 1) A method according to claim 1, wherein the corresponding gas residence time (Tgr) of the processing chamber for the at least one of the control steps is between 0.1 and 5 seconds. ### Claim 3 (depends on 1) A method according to claim 1, wherein the or each control step comprising instructing the one or more devices to implement a defined set of constant process parameters for the duration of the step, which duration is less than the corresponding gas residence time (Tgr) of the processing chamber for the step, has a duration of less than 1 second. ### Claim 4 (depends on 1) A method according to claim 1, wherein the first and second sequential subsets of control steps form a cycle which is repeated such that the passivation process phase and etching process phase are performed alternately. ### Claim 5 (depends on 4) A method according to claim 4, wherein the second sequential subset of control steps constituting the etching process phase comprises a first portion during which the processing parameters are selected for partial removal of the passivation layer in a passivation layer removal process sub-phase, and a second portion during which the processing parameters are selected for etching of the exposed substrate in a substrate etch process sub-phase. ### Claim 6 (depends on 5) A method according to claim 5, wherein at least 50% of the total duration of the cycle corresponds to the substrate etch process sub-phase. ### Claim 7 (depends on 5) A method according to claim 5, wherein during at least one of the control steps constituting the passivation layer removal process sub-phase, the process parameters comprise directional, ion-assisted etching. ### Claim 8 (depends on 5) A method according to claim 5, wherein during at least one of the control steps constituting the substrate etch process sub-phase, the process parameters comprise substantially isotropic, chemical etching. ### Claim 9 (depends on 5) A method according to claim 5, wherein during at least one of the control steps constituting the passivation layer removal process sub-phase, preferably the core passivation layer removal step, the one or more devices are instructed to apply an alternating bias voltage to the substrate, the frequency of which is preferably at least 50 kHz. ### Claim 10 (depends on 5) A method according to claim 5, wherein the passivation layer removal process sub-phase comprises a core sequence of control steps by means of which the one or more devices are alternately instructed to implement zero substrate bias power or a nominal bias power of less than 300 W/m2 in one control step, and a higher substrate bias power of between 1500 and 8000 W/m2 in the next control step. ### Claim 11 (depends on 1) A method according to claim 1, wherein the process parameters include any of: the gas flow rate of at least one input gas, the pressure within the chamber, the exhaust pumping speed, wafer backside gas pressure, plasma source power or frequency, substrate bias power or frequency, and impedance matching settings. ### Claim 12 (depends on 1) A method according to claim 1, wherein the defined set of constant process parameters implemented during the at least one of the control steps having a duration less than the gas residence time (Tgr) of the processing chamber includes process parameters selected to give rise to different gas conditions within the chamber relative to those of the preceding and/or subsequent control steps, wherein the different gas conditions are selected from the group consisting of a different gas flow rate of at least one input gas, a different pressure within the chamber, a different exhaust net pumping speed, a different temperature, and a combination thereof. ### Claim 13 (depends on 1) A method according to claim 1, wherein the one or more devices comprises a plurality of devices and the series of control steps includes one or more transition control steps, in each of which one or a subset of the devices is instructed to effect a change in a corresponding process parameter, the timing of the or each transition control step being related to the known response time of the instructed device(s), wherein the change in the corresponding process parameter is selected from the group consisting of an increase in flow rate, a decrease in flow rate, a change in pressure, a change in temperature, and a combination thereof. ### Claim 14 (depends on 13) A method according to claim 13, wherein the series of control steps includes a sequence of transition control steps, according to which individual ones or subsets of the plurality of devices are instructed to effect changes in corresponding process parameters in sequence according to the devices' known response times, whereby the instructed changes to the corresponding process parameters are effected substantially in synchronicity with one another, preferably substantially simultaneously, wherein the changes in the corresponding process parameters are selected from the group consisting of an increase in flow rate, a decrease in flow rate, a change in pressure, a change in temperature, and a combination thereof. ### Claim 15 (depends on 1) A method according to claim 1, wherein each of the control steps in the series has a duration which is less than the corresponding gas residence time (Tgr) of the processing chamber for the step. ### Claim 16 (depends on 1) A method according to any claim 1, wherein the net effect of the series of control steps is the etching of material from the substrate, the method further comprising monitoring the substrate as the etching progresses, detecting when the etching has reached a predetermined endpoint, and outputting an endpoint signal. ### Claim 17 (depends on 16) A method according to claim 16, further comprising halting the series of control steps in response to the endpoint signal. ### Claim 18 (depends on 16) A method according to claim 16, further comprising starting a second, different, series of control steps in response to the endpoint signal. ### Claim 19 (depends on 16) A method according to claim 16, wherein the monitoring the substrate comprises monitoring the etching depth, preferably using an optical interferometer, and the predetermined endpoint is a predetermined etching depth. ### Claim 20 (depends on 16) A method according to claim 16, wherein the monitoring the substrate comprises monitoring the composition of the material being etched, the substrate comprising a stop layer underlying and of a different composition to the layer to be etched, the endpoint detection signal being output when a change in composition is detected. ### Claim 21 (depends on 5) A method according to claim 5, wherein at least one of the process phases and sub-phases comprises a core process step and one or more intermediate control steps before and/or after the core process step, the or each of the intermediate control steps comprising instructing the one or more devices to implement a defined set of constant process parameters of which at least one has a value which lies between that of the same process parameter in the core process step and in the preceding or subsequent process phase or sub-phase. ### Claim 22 (depends on 21) A method according to claim 21, wherein the or each of the intermediate control steps comprises instructing the one or more devices to input gas comprising a mixture of first and second species into the chamber, the core process step comprising instructing the one or more devices to input gas predominantly of the first species into the chamber and the preceding or subsequent process phase or sub-phase comprising instructing the one or more devices to input gas predominantly of the second species into the chamber. ### Claim 23 (depends on 22) A method according to claim 22, wherein in a plurality of consecutive intermediate control steps, the one or more devices are instructed to input gas comprising respective mixtures of the first and second species into the chamber, wherein the ratio of the first species to the second species in each consecutive mixture varies, whereby a gradual transition from the first gas species to the second species is effected. ### Claim 24 (depends on 21) A method according to claim 21, wherein the series of control steps includes a plurality of intermediate control steps between at least one pair of adjacent core process steps in the cycle, the defined set of process parameters implemented by each of the intermediate control steps varying from one intermediate control step to the next so as to effect a gradual change in the process parameters between the pair of adjacent core process steps. ### Claim 25 (depends on 21) A method according to claim 21, wherein the duration of the or each intermediate process step, during which the one or more devices are instructed to implement the defined set of constant intermediate process parameters, is less than the corresponding gas residence time (Tgr) of the processing chamber for the step, which is defined as: T gr = pV Q Where: p is the chamber pressure in units of Pa; V is the volume of the processing chamber in units of m3; and Q is the gas flow rate through the chamber in units of Pa·m3·s−1. ### Claim 26 (depends on 25) A method according to claim 25, wherein the sum of the duration(s) of the or each intermediate process step between adjacent core process steps in the cycle is less than the average gas residence time (Tgr) of those intermediate process steps. ### Claim 27 A method of etching material from a substrate in a surface processing tool, the substrate comprising a semiconducting or conducting layer provided with an overlying or underlying insulating layer, the surface processing tool comprising a processing chamber, a controller and a plurality of devices for adjusting the process parameters within the chamber, including a bias power source for applying a bias voltage to the substrate, the method comprising: the controller alternately instructing the plurality of devices to implement a cycle of etching and passivation process phases, one after another, and, during at least part of at least one of the alternate process phases, controlling the power source in an alternating sequence of steps, comprising the controller alternately instructing the power source to output a bias voltage with a first magnitude for the duration of a first step of the alternating sequence, and then to output a bias voltage with a second magnitude for the duration of a second step of the alternating sequence, wherein the second magnitude is higher than the first magnitude, whereby the formation of side wall notches at an interface between the semiconducting or conducting layer and the insulating layer is reduced.