High-resolution amplitude contrast imaging
AssigneesUniversiteit Antwerpen, FEI Company
InventorsDirk Van Dyck, Uwe Lucken, Holger Stark, Sara Bals
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Abstract
A method for performing high resolution electron microscopy of a soft matter object is described. The method comprises irradiating a soft matter object using an electron microscope having a spherical aberration correction with a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the soft matter object. The method comprises detecting the thermal diffuse scattered (TDS) electrons scattered at the soft matter, and using the detected thermal diffuse scattered electrons for deriving therefrom an image of the soft matter object.
Claims20
A method for performing high resolution electron microscopy of an object at atomic level resolution, the method comprising:
- irradiating a soft matter object using an electron microscope having a spherical aberration correction;
- detecting the thermal diffuse scattered electrons scattered at the object;
- wherein the method comprises:
- irradiating the soft matter object by a coherent electron source;
- using the detected thermal diffuse scattered electrons for deriving therefrom an image of the object;
- wherein the spherical aberration correction has a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the object, within a tolerance margin in the order of micrometers.
A system for performing high resolution electron microscopy of an object at atomic level resolution, the system comprising:
- an electron source;
- a spherical aberration corrector;
- a detector arranged for detecting the thermal diffuse scattered electrons scattered at the object;
- wherein:
- the electron source is a coherent electron source;
- the spherical aberration corrector has a constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the object, within a tolerance margin in the order of micrometers;
- an image processor for using the detected thermal diffuse scattered electrons for deriving based thereon an image of the object.
Dependencies are inferred from the claim text.