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US 9,410,742 B2Granted
High capacity magnetic annealing system and method of operating
AssigneeTokyo Electron Limited
InventorsIan Colgan, Ioan Domsa, George Eyres, Toru Ishii
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AssigneeTokyo Electron Limited
InventorsIan Colgan, Ioan Domsa, George Eyres, Toru Ishii
Estimating the term…
An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.
An annealing system, comprising:
A method of operating an annealing system including a first workpiece boat, a vertical furnace, a boat loader, and a magnet system, the annealing system comprising:
Dependencies are inferred from the claim text.