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US 9,410,016 B2Granted
Aromatic polyacetals and articles comprising them
AssigneeDow Global Technologies LLC
InventorsMatthias S. Ober, Duane R. Romer, John B. Etienne, Pulikkottil J. Thomas
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Abstract
A polymer includes repeat units having the structure wherein R1, R2, Ar1, Ar2, and Ar3 are defined herein. The polymer can be prepared by Suzuki polycondensation. The acetal and/or ketal functionality in the polymer backbone make the backbone-cleavable in acid. The polymer is useful in applications including lithographic photoresists.
Claims10
A polymer comprising a plurality of repeat units having the structure
- wherein
- each occurrence of R1 is independently hydrogen, unsubstituted or substituted C1-18 linear or branched alkyl, unsubstituted or substituted C3-18 cycloalkyl, unsubstituted or substituted C6-18 aryl, or unsubstituted or substituted C3-18 heteroaryl;
- each occurrence of R2 is independently unsubstituted or substituted C1-18 linear or branched alkyl, unsubstituted or substituted C3-18 cycloalkyl, unsubstituted or substituted C6-18 aryl, or unsubstituted or substituted C3-18 heteroaryl, provided that at least one of R1 and R2 is not hydrogen;
- and R1 and R2 are optionally covalently linked to each other to form a ring that includes —R1—C—R2;
- each occurrence of Ar1, Ar2, and Ar3 is independently unsubstituted or substituted C6-18 arylene, or unsubstituted or substituted C3-18 heteroarylene;
- provided that at least one occurrence of Ar1, Ar2, and Ar3 is substituted with at least one functional group selected from hydroxyl, acetal, ketal, ester, and lactone.
3 more elements
Dependencies are inferred from the claim text.