Method and device for characterizing an electron beam using an X-ray detector with a patterned aperture resolver and patterned aperture modulator
AssigneeArcam AB
InventorTomas Lock
Life of this patent
Estimating the term…
Abstract
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.
Claims6
A method for verifying an electron beam, said method comprising the steps of:
- arranging a patterned aperture resolver having at least one opening in front of at least one X-ray detector, where said at least one opening is facing towards said at least one X-ray detector;
- arranging a patterned aperture modulator between said patterned aperture resolver and a substrate and at a predetermined distance from said patterned aperture resolver and said substrate, said patterned aperture modulator having a plurality of openings in at least a first direction;
- scanning an electron beam in at least said first direction on said substrate for generating X-rays to be received by said at least one X-ray detector;
- and
- verifying at least one of a position, size and shape of said electron beam by comparing a detected intensity modulation of said X-ray signal by said detector with corresponding reference values, wherein said electron beam is said to be verified if a deviation of said detected intensity modulation and said reference value is smaller than a predetermined value.
A program element configured and arranged when executed on a computer to implement a method for verifying an electron beam, said method comprising the steps of:
- arranging a patterned aperture resolver having at least one opening in front of at least one X-ray detector, where said at least one opening is facing towards said at least one X-ray detector;
- arranging a patterned aperture modulator between said patterned aperture resolver and a substrate and at a predetermined distance from said patterned aperture resolver and said substrate, said patterned aperture modulator having a plurality of openings in at least a first direction;
- scanning an electron beam in at least said first direction on said substrate for generating X-rays to be received by said at least one X-ray detector;
- and
- verifying at least one of a position, size and shape of said electron beam by comparing a detected intensity modulation of said X-ray signal by said detector with corresponding reference values, wherein said electron beam is said to be verified if a deviation of said detected intensity modulation of said X-ray signal and said reference value is smaller than a predetermined value.
A non-transitory computer program product comprising at least one non-transitory computer-readable storage medium having computer-readable program code portions embodied therein, the computer-readable program code portions comprising:
- an executable portion configured for arranging a patterned aperture resolver having at least one opening in front of at least one X-ray detector, where said at least one opening is facing towards said at least one X-ray detector;
- an executable portion configured for arranging a patterned aperture modulator between said patterned aperture resolver and a substrate and at a predetermined distance from said patterned aperture resolver and said substrate, where said patterned aperture modulator having a plurality of openings in at least a first direction;
- an executable portion configured for scanning an electron beam in at least said first direction on said substrate for generating X-rays to be received by said at least one X-ray detector;
- and
- an executable portion configured for verifying at least one of a position, size and shape of said electron beam by comparing a detected intensity modulation of said X-ray signal by said detector with corresponding reference values, wherein said electron beam is said to be verified if a deviation of said detected intensity modulation of said X-ray signal and said reference value is smaller than a predetermined value.
Dependencies are inferred from the claim text.