US 9,406,479 B1Granted

Mirror pulse compressor for electron beam apparatus

AssigneeElectron Optica, Inc.

InventorMarian Mankos

Life of this patent

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Abstract

One embodiment pertains to an apparatus for compressing an electron pulse. An electron source is illuminated by a pulsed laser and generates a pulse of electrons. The pulse enters a beam separator which deflects the electrons by 90 degrees into an electron mirror. The faster, higher energy electrons form the leading edge of the pulse and penetrate more deeply into the retarding field of the electron mirror than the lower energy electrons. After reflection, the lower energy electrons exit the electron mirror before the higher energy electrons and form the leading edge of the pulse. The reflected pulse reenters the separator and is deflected by 90 degrees towards the specimen. The fast, higher energy electrons catch up with the slow, low energy electrons as the electrons strike the specimen. The electrons are scattered by the specimen and used to form a two-dimensional image or diffraction pattern of the specimen.

Claims15

Dependent claims

An apparatus for producing an electron pulse with reduced temporal width from an electron pulse with a large temporal width, the apparatus comprising:

an electron source configured to generate a short pulse of electrons with a range of energies and propagating along an optical axis;
an electron mirror configured to:
receive the electron pulse, wherein the high-energy component of the electron pulse enters prior to the low-energy component of the electron pulse, and
decelerate the electron pulse, wherein the high-energy component of the electron pulse penetrates more deeply into the electron mirror than the low-energy component of the electron pulse, and
reflect and reaccelerate the electron pulse so that the the low-energy component of the electron pulse exits prior to the high-energy component of the electron pulse;
an objective lens located along the optical axis downstream from the electron source;
an electron-deflecting device located along the optical axis between the electron source and objective lens and configured to:
receive the electron pulse from the electron source and deflect the electron pulse by ninety degrees towards the electron mirror, and
receive the electron pulse reflected by the electron mirror and deflect the electron pulse by ninety degrees towards the objective lens.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/751,087Filed 25 Jun 2015
Granted: 2 Aug 2016
Term ends: Not estimatedThe source records don’t support an estimate.

Classification14 codes

H01J 37/28
Electron or ion microscopes; Electron or ion diffraction tubes: with scanning beams
G01R 31/307
Using electron beams: of integrated circuits
G01R 31/44
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by…
H01J 37/045
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical…:…