MEMS device having a microphone structure, and method for the production thereof

A MEMS device having a microphone structure realized in a layer construction on top of a base substrate, comprising:

• the base substrate;
• a deflectable microphone diaphragm, formed in a diaphragm layer in the layer construction, which (i) at least partly spans a through-opening in the base substrate, and (ii) is provided with at least one deflectable electrode of a microphone condenser system;
• and
• a stationary counter-element having ventilation openings, the stationary counter element being formed in a composite layer above the diaphragm layer in the layer construction, the stationary counter-element acting as a bearer for at least one stationary electrode of the microphone condenser system;
• wherein the mid-region of the microphone diaphragm is fashioned essentially plane-parallel to a substrate plane, and in a rest state a mid-region of the microphone diaphragm is situated inside the through-opening in the base substrate, and wherein the microphone diaphragm is bonded onto the base substrate via at least one flexible beam, and wherein a free edge region of the microphone diaphragm is curved in so that the free edge region extends both vertically and, at least in some areas, also laterally beyond the edge region of the through-opening, and the edge region of the through-opening forms a lower stop for the diaphragm movement;
• wherein the edge region of the microphone diaphragm and an edge region of the counter-element are capable of forming together an edge seal for the microphone structure;
• and
• wherein the microphone diaphragm has rounded contours.