Guided wave applicator with non-gaseous dielectric for plasma chamber

A method for coupling electrical power to a plasma, comprising the steps of:

• providing one or more guided wave applicators within a plasma chamber, wherein each guided wave applicator comprises:
• (i) first and second waveguide walls, wherein each waveguide wall is electrically conductive, and
• (ii) a waveguide dielectric whose volume is composed of non-gaseous dielectric material, wherein the waveguide dielectric is positioned between the two waveguide walls, and wherein the waveguide dielectric includes first and second longitudinal ends and first, second, third and fourth sides that extend longitudinally between the first and second longitudinal ends;
• and
• coupling electrical power from an electrical generator to at least one of the longitudinal ends of the waveguide dielectric of each guided wave applicator;
• wherein, for each respective guided wave applicator:
• the first waveguide wall of said respective guided wave applicator is positioned so that it covers the first side of the waveguide dielectric of said respective guided wave applicator;
• the second waveguide wall of said respective guided wave applicator is positioned so that it covers the second side of the waveguide dielectric of said respective guided wave applicator;
• and
• a portion of each of the third and fourth sides of the waveguide dielectric of said respective guided wave applicator is not covered by the waveguide walls of said respective guided wave applicator.

A method for coupling electrical power to a plasma, comprising the steps of:

• providing a guided wave applicator that comprises (a) first and second waveguide walls, wherein each waveguide wall is electrically conductive, and (b) a waveguide dielectric whose volume is composed of non-gaseous dielectric material, wherein the waveguide dielectric includes:
• (i) first and second longitudinal ends, and
• (ii) first, second, third and fourth sides that extend longitudinally between the two longitudinal ends;
• and
• coupling electrical power from an electrical generator to at least one of the longitudinal ends of the waveguide dielectric;
• wherein:
• the waveguide dielectric is positioned between the two waveguide walls;
• the first waveguide wall is positioned so that it covers the first side of the waveguide dielectric;
• the second waveguide wall is positioned so that it covers the second side of the waveguide dielectric;
• and
• a portion of each of the third and fourth sides of the waveguide dielectric is not covered by the waveguide walls and is exposed to the exterior of the guided wave applicator.