High density interconnection of microelectronic devices
AssigneeIntel Corporation
InventorsOmkar G. Karhade, John S. Guzek, Johanna M. Swan, Christopher J. Nelson, Nitin A. Deshpande, William J. Lambert, Charles A. Gealer, Feras Eid, Islam A. Salama, Kemal Aygun, Sasha N. Oster, Tyler N. Osborn
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