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US 9,394,615 B2Granted
Plasma resistant ceramic coated conductive article
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh, Dmitry Lubomirsky
Life of this patent
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Abstract
To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
Claims20
A component of a plasma etch reactor comprising:
- a metal portion of the component having a roughened surface with a roughness of approximately 100 micro-inches (μin) to approximately 300 μin, wherein the metal portion of the component comprises a first region and a second region thermally isolated from the first region by a thermal break;
- and
- a ceramic coating on the roughened surface of the metal portion of the component, wherein the ceramic coating comprises a yttrium containing oxide, the ceramic coating having a thickness of approximately 10-40 mil, wherein the ceramic coating has a thermal shock resistance sufficient for use at a temperature of up to approximately 150 degrees Celsius.
A component of a plasma etch reactor comprising:
- a metal portion of the component having a roughened surface with a roughness of approximately 100 micro-inches (μin) to approximately 300 μin;
- and
- a ceramic coating on the roughened surface of the metal portion of the component, wherein the ceramic coating is a composite comprising Y4Al2O9 (YAM) and a solid solution of Y2-xZrxO3, the ceramic coating having a thickness of approximately 10-40 mil, wherein the ceramic coating has a thermal shock resistance sufficient for use at a temperature of up to approximately 150 degrees Celsius.
A component of a plasma etch reactor comprising:
- a metal portion of the component having a roughened surface with a roughness of approximately 100 micro-inches (μin) to approximately 300 μin;
- and
- a ceramic coating on the roughened surface of the metal portion of the component, wherein the ceramic coating is selected from a list consisting of Y3A15O12 (YAG) and Y2O3 stabilized ZrO2, the ceramic coating having a thickness of approximately 10-40 mil, wherein the ceramic coating has a thermal shock resistance sufficient for use at a temperature of up to approximately 150 degrees Celsius.
Dependencies are inferred from the claim text.