Multiple probe actuation

Actuation apparatus for actuating a plurality of probes in a scanning probe microscope system, the apparatus comprising:

• a beam source for generating an input beam;
• an optical device arranged to receive the input beam and transform the input beam to generate an actuation beam which is output from the optical device at an output angle;
• and a controller arranged to operate the optical device to modulate the output angle of the actuation beam over time so that the actuation beam is sequentially directed onto the probes thereby delivering energy to the probes so that the probes deform relative to a sample, wherein the energy is delivered to the probes by sequentially illuminating them with the actuation beam in a series of scan sequences, wherein two or more of the probes are illuminated by the actuation beam in each scan sequence;
• and the controller is arranged to operate the optical device and/or the beam source and/or an optical element in a path of the actuation beam or in a path of the input beam so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.