Semiconductor crystal removal apparatus and production method for semiconductor crystal
AssigneeToyoda Gosei Co., Ltd.
InventorsShiro Yamazaki, Seiji Nagai, Miki Moriyama
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AssigneeToyoda Gosei Co., Ltd.
InventorsShiro Yamazaki, Seiji Nagai, Miki Moriyama
Estimating the term…
The present invention provides a semiconductor crystal removal apparatus which realizes effective removal of a semiconductor crystal from a crucible through rapid melting of a solidified flux, and a method for producing a semiconductor crystal. The semiconductor crystal removal apparatus includes a crucible support for supporting a crucible so that the opening of the crucible is directed downward; a heater for heating the crucible supported on the crucible support; and a semiconductor crystal receiving net for receiving a semiconductor crystal falling from the opening of the crucible. The semiconductor crystal removal apparatus further includes a determination portion for determining removal of the semiconductor crystal on the basis of a change in weight through falling of the semiconductor crystal.
A semiconductor crystal removal apparatus for removing a Group III nitride semiconductor crystal from a crucible, the crystal having been produced in the crucible through the flux process, the semiconductor crystal removal apparatus comprising:
A semiconductor crystal removal apparatus for removing a Group III nitride semiconductor crystal from a crucible, the crystal having been produced in the crucible through the flux process, the semiconductor crystal removal apparatus comprising:
Dependencies are inferred from the claim text.