Electron exit window foil
AssigneeTetra Laval Holdings & Finance S.A.
InventorsLuca Poppi, Anders Kristiansson, Benno Zigerlig, Werner Haag, Kurt Holm, Lars-Åke Näslund
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Abstract
An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment is provided. The electron exit window foil comprises a sandwich structure having a film of Ti, a first layer of a material having a higher thermal conductivity than Ti, and a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment.
Claims14
An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment, the electron exit window foil comprising a sandwich structure having
- a film of Ti,
- a first layer of a material having a higher thermal conductivity than Ti,
- a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment, and
- at least one adhesive barrier coating between the Ti film and the first layer and/or the second layer,
- wherein said at least one adhesive barrier coating is a layer of Al2O or ZrO2.
A method for providing an electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment, said method comprising:
- providing a film of Ti,
- providing a first layer of a material having a higher thermal conductivity than Ti onto a first side of said film,
- providing a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment, and
- providing at least one adhesive barrier coating between the Ti film and the first layer and/or the second layer,
- wherein said at least one adhesive barrier coating is a layer of Al2O or ZrO2.
A method for providing a high performance electron beam device, comprising:
- providing a foil-frame subassembly comprising the steps of:
- attaching a film of Ti onto a frame, and
- processing said film by providing a first layer of a material having a higher thermal conductivity than Ti onto a first side of said film, and providing a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment and
- attaching said foil-frame subassembly to a tube housing of an electron beam device for sealing said electron beam device.
Dependencies are inferred from the claim text.