Back to results
US 9,382,109 B2Granted
MEMS microphone with reduced parasitic capacitance
AssigneeEpcos AG
InventorsLeif Steen Johansen, Jan Tue Ravnkilde, Pirmin Hermann Otto Rombach, Kurt Rasmussen
Life of this patent
Estimating the term…
Abstract
A MEMS microphone has reduced parasitic capacitance. The microphone includes a trench electrically separating an acoustically active section of a backplate from an acoustically inactive section of the backplate.
Claims13
A MEMS microphone, comprising:
- an acoustically active region;
- a rim region surrounding the acoustically active region;
- a membrane in a membrane layer, the membrane having a section in the acoustically active region and a section in the rim region;
- a first backplate in a first backplate layer, the first backplate having a section in the acoustically active region and a section in the rim region;
- and
- a first trench that electrically separates the membrane section of the rim region from the membrane section of the acoustically active region and/or the first backplate's section of the rim region from the first backplate's section of the acoustically active region, wherein a resistance between the separated regions is 10GΩ or more.
3 more elements
A method for manufacturing a MEMS microphone, the method comprising:
- providing a substrate;
- structuring a membrane on the substrate, the membrane having a section in an acoustically active region and a section in a rim region;
- depositing an anchor layer onto the membrane;
- depositing a backplate layer onto the anchor layer;
- structuring a backplate and an anchor element, the backplate having a section in the acoustically active region and a section in the rim region;
- and
- structuring a trench in the backplate such that a central section of the backplate is electrically separated from a rim sided section of the backplate and a resistance between the central section of the backplate and the rim sided section is 10GΩ or more.
4 more elements
Dependencies are inferred from the claim text.