Photoreflectance device
AssigneesNexcis, Universite D'Aix-Marseille
InventorsAntonin Moreau, Véronica Bermudez, Ludovic Escoubas, Jean-Jacques Simon
Life of this patent
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Abstract
A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface.
Claims8
A photoreflectance device for characterising a rough surface, comprising:
- a pump beam emitter configured to emit a pump beam;
- a probe beam emitter configured to emit a probe beam;
- a detector configured to detect a beam reflected by the surface, and
- an integrating sphere that is disposed so as to collect the probe beam reflected by the surface, the integrating sphere including:
- a first output to which the detector is connected, the first output being disposed so as to receive a majority of the probe beam reflected by the surface;
- a second output arranged so as to receive a specular reflection from the pump beam reflected by the surface.
Dependencies are inferred from the claim text.