Method of forming dual size microlenses for image sensors
AssigneeOmniVision Technologies, Inc.
InventorsJin Li, Gang Chen, Yin Qian, Hsin-Chih Tai
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AssigneeOmniVision Technologies, Inc.
InventorsJin Li, Gang Chen, Yin Qian, Hsin-Chih Tai
Estimating the term…
A method of forming microlenses for an image sensor having at least one large-area pixel and at least one small-area pixel is disclosed. The method includes forming a uniform layer of microlens material on a light incident side of the image sensor over the large-area pixel and over the small-area pixel. The method also includes forming the layer of microlens material into a first block disposed over the large-area pixel and into a second block disposed over the small-area pixel. A void is also formed in the second block to reduce a volume of microlens material included in the second block. The first and second blocks are then reflowed to form a respective first microlens and second microlens. The first microlens has substantially the same effective focal length as the second microlens.
A method of forming microlenses for an image sensor having at least one large-area pixel and at least one small-area pixel, the method comprising:
A method of forming microlenses for a complementary metal oxide semiconductor (CMOS) image sensor having at least one large-area pixel and at least one small-area pixel, the method comprising:
Dependencies are inferred from the claim text.