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US 9,370,864 B2Granted
Compliant micro device transfer head
AssigneeApple Inc.
InventorsAndreas Bibl, John A. Higginson, Hsin-Hua Hu
Life of this patent
Estimating the term…
Abstract
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.
Claims17
A transfer head array comprising:
- a base substrate;
- and
- an array of transfer heads, each transfer head comprising:
- a first spring arm extending from a first spring anchor to a spring platform;
- a second spring arm extending from a second spring anchor to the spring platform;
- and
- a mesa structure on the spring platform, wherein the spring platform is deflectable into a space between the spring platform and the base substrate.
4 more elements
Dependencies are inferred from the claim text.