A method for generating radiation, wherein plasma is ignited in a chamber (1) with gas and from a first side (5) of the chamber (1) a laser beam (7), in continuous mode, is focused into the chamber,
- a region of radiating plasma (6) is formed, extending along an axis of focused laser beam, with small, ranging from 0.1-0.5, aspect ratio d/l of transverse d and longitudinal I dimensions of the region of radiating plasma, wherein brightness of plasma radiation in a direction along the axis (10) of the focused laser beam (7) is close to a maximum attainable for a specified laser power, with properties of a plasma lens, providing a decrease in a numerical aperture NA2 of a divergent laser beam (9) from a second side (11) of the chamber (1) compared to a numerical aperture NA1 of the focused laser beam (7) from the first side of the chamber:
- NA2<NA1;
- an output of plasma radiation onto an optical system (14), located on the second side (11) of the chamber, for collecting plasma radiation is carried out using a divergent beam (15) of plasma radiation, with a direction of an optical axis (16) primarily coinciding with the direction of the axis (10) of the focused laser beam,
- by using a blocker (8) prevent a passage of the divergent laser beam (9) to the optical system (14) for collecting plasma radiation.