Plate, transducer and methods for making and operating a transducer
AssigneeInfineon Technologies AG
InventorAlfons Dehe
Life of this patent
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Abstract
A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.
Claims24
A transducer device comprising:
- a membrane;
- and
- a backplate spaced apart from the membrane, the backplate comprising:
- a first material layer comprising a first stress;
- a second material layer arranged adjacent the first material layer, the second material layer comprising a second stress;
- an opening extending through the first material layer and the second material layer;
- and
- an extension shaping the opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved towards the membrane.
A transducer device comprising:
- a membrane;
- and
- a backplate spaced apart from the membrane, the backplate comprising:
- a first material layer comprising a first stress;
- a second material layer arranged adjacent the first material layer, the second material layer comprising a second stress;
- elongated openings extending through the first material layer and the second material layer;
- and
- extensions shaping the elongated openings, wherein the extensions comprise portions of the first material layer and portions of the second material layer, and wherein the extensions are curved towards the membrane,
- wherein the elongated openings are aligned such that first elongated openings are aligned in a first direction and second elongated openings are aligned in a second direction that is different from the first direction.
A transducer device comprising:
- a membrane;
- and
- a backplate spaced apart from the membrane, the backplate comprising:
- a first material layer comprising a first stress;
- a second material layer arranged adjacent the first material layer, the second material layer comprising a second stress;
- elongated openings extending through the first material layer and the second material layer;
- and
- extensions shaping the elongated openings, wherein the extensions comprise portions of the first material layer and portions of the second material layer, and wherein the extensions are curved towards the membrane,
- wherein the elongated openings are symmetrically aligned such that first elongated openings are aligned in a first direction, second elongated openings are aligned in a second direction, third elongated openings are aligned in a third direction and fourth elongated openings are aligned in a fourth direction.
Dependencies are inferred from the claim text.