Integrated phase change switch
AssigneeQualcomm Switch Corp.
InventorsSinan Goktepeli, Michael A. Stuber
Life of this patent
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Abstract
Various methods and devices that involve phase change material (PCM) switches are disclosed. An exemplary integrated circuit comprises an active layer with a plurality of field effect transistor (FET) channels for a plurality of FETs. The integrated circuit also comprises an interconnect layer comprising a plurality of conductive interconnects. The plurality of conductive interconnects couple the plurality of field effect transistors. The integrated circuit also comprises an insulator layer covering at least a portion of the interconnect layer. The integrated circuit also comprises a channel of a radio-frequency (RF) PCM switch. The channel of the RF PCM switch is formed on the insulator layer.
Claims19
An integrated circuit comprising:
- an active layer comprising a plurality of field effect transistor channels for a plurality of field effect transistors;
- an interconnect layer comprising a plurality of conductive interconnects, wherein the plurality of conductive interconnects couple the plurality of field effect transistors;
- an insulator layer covering at least a portion of the interconnect layer;
- and
- a channel of a radio-frequency phase change material switch, wherein the channel of the radio-frequency phase change material switch is formed on the insulator layer.
A monolithic integrated circuit comprising:
- a semiconductor substrate that has been doped to form a plurality of active regions for a plurality of field effect transistors;
- a radio-frequency phase change material switch having a phase change material channel, a first contact, and a second contact;
- and
- an interconnect layer located between the phase change material channel and the semiconductor substrate, wherein the radiofrequency phase change material switch further comprises:
- a heating element;
- and
- a thermally conductive dielectric located between the phase change material channel and the heating element.
Dependencies are inferred from the claim text.