# US 9,360,660 B2 · Methods and apparatus for laser scanning structured illumination microscopy and tomography

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- Number: US 9,360,660 B2
- Document ID: US9360660B2
- Status: Granted
- Kind: B2
- Application number: 13/902,288
- Filed: 2013-05-24
- Published: 2013-11-28
- Granted: 2016-06-07
- Earliest claimed: 2012-05-24
- Assignees: Northwestern University
- Applicants: Northwestern University
- Inventors: Ji Yi; Vadim Backman; Qing Wei; Hao F. Zhang
- Web page: https://patentgrep.com/patent/US9360660B2

## CPC

- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G01B 9/02014: {by using pulsed light}
- G01B 9/02044: {Imaging in the frequency domain, e.g. by using a spectrometer}
- G01B 9/02069: {Synchronization of light source or manipulator and detector}
- G01B 9/02091: Tomographic interferometers, e.g. based on optical coherence
- G01N 21/45: using interferometric methods; using Schlieren methods
- G01N 21/4795: {spatially resolved investigating of object in scattering medium (in vivo A61B)}
- G01N 21/64: Fluorescence; Phosphorescence
- G01N 21/6458: {Fluorescence microscopy (fluorescence microscopes per se G02B21/0076 and G02B21/16)}
- G01N 2021/1787: {Tomographic, i.e. computerised reconstruction from projective measurements}
- G01N 2021/456: {Moire deflectometry}
- G01N 2201/067: Electro-optic, magneto-optic, acousto-optic elements
- G01N 2201/0691: Modulated (not pulsed supply)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

Certain examples provide a structured illumination microscopy system. The example system includes a laser source to generate excitation illumination directed toward a target. The example system includes a modulator to modulate the excitation illumination temporally in a controllable spatial pattern to be constructed on the target object to provide sub-diffractional resolution in a lateral direction with respect to the target. The example system includes two synchronized laser scanning mirror units in confocal arrangement, the laser scanning units to be synchronized and controlled by a computing device, a first of the scanning mirror units to receive the modulated excitation illumination and project the modulated excitation illumination on the target object and a second of the scanning mirror units to receive emission fluorescence from the target and project the emission fluorescence. The example system includes a detector to collect emission fluorescence from the target via the second of the scanning mirror units.

## Claims

### Claim 1

A structured illumination microscopy system comprising:
a laser source to generate excitation illumination directed toward a target object;
a modulator to modulate the excitation illumination temporally in a controllable, periodic spatial pattern to be constructed on the target object to provide sub-diffractional resolution in a lateral direction with respect to the target object;
two synchronized laser scanning mirrors in confocal arrangement, the two laser scanning mirrors units to be synchronized and controlled to translate the temporally modulated illumination into the periodic spatial pattern on the target object, a first of the two scanning mirrors to receive the modulated excitation illumination and project the modulated excitation illumination with a controllable phase delay on the target object in periodic spatial pattern by linearly steering a focal spot of the modulated excitation illumination in the lateral direction to transform the modulated excitation illumination into the periodic spatial pattern, wherein tuning of a frequency of the temporal modulation determines a period of the spatial pattern, and a second of the two scanning mirrors to receive emission fluorescence from the target object generated by the periodic spatial pattern of modulated excitation illumination and project the emission fluorescence;
a detector to collect emission fluorescence from the target object via the second of the two scanning mirrors for processing to form an image; and
a computing device to control the modulator to modulate the excitation illumination temporally in a controllable, periodic spatial pattern and to control the periodic spatial pattern with respect to the first scanning mirror to enhance lateral resolution beyond a diffraction limit in the image formed based on the emission fluorescence collected from the target object via the second scanning mirror by shifting high spatial frequencies in a Fourier domain into a detectable range to enhance the lateral resolution beyond the diffraction limit, wherein the computing device further controls the modulation of the excitation illumination to include a non-integer number of modulation periods to control the phase delay.

### Claim 2 (depends on 1)

The system of claim 1, wherein the modulator comprises an optical chopper.

### Claim 3 (depends on 1)

The system of claim 1, wherein the modulator further comprises a mirror.

### Claim 4 (depends on 3)

The system of claim 3, wherein the mirror comprises at least one of a galvo mirror, a polygon mirror, and a dichroic mirror.

### Claim 5 (depends on 1)

The system of claim 1, wherein the modulator comprises an electro-opto modulator.

### Claim 6 (depends on 5)

The system of claim 5, wherein the modulator further comprises a polarizer.

### Claim 7

The system of claim of 1, wherein the detector comprises a photomultiplier tube.

### Claim 8 (depends on 1)

The system of claim 1, wherein the detector comprises a charge coupled device camera.

### Claim 9 (depends on 8)

The system of claim 8, wherein the detector further comprises a spectrometer.

### Claim 10 (depends on 1)

The system of claim 1, wherein the laser comprises at least one of a pulse laser illumination source and a continuous wave laser.

### Claim 11

A structured interference optical coherence tomography system comprising:
a laser source to generate excitation illumination directed toward a target object;
a modulator to modulate the excitation illumination temporally in a controllable, periodic spatial pattern to be constructed on the target object to provide sub-diffractional resolution in a lateral direction with respect to the target object;
two pairs of laser scanning mirrors in confocal arrangement, the laser scanning mirrors synchronized and controlled to receive the modulated excitation illumination and project the modulated excitation illumination with a controllable phase delay on the target object by linearly steering a focal spot of the modulated excitation illumination in the lateral direction to transform the modulated excitation illumination into the periodic spatial pattern on the target object, wherein tuning of a frequency of the temporal modulation determined a period of the spatial pattern;
a detector to collect emission illumination from the target object via the two pairs of laser scanning mirrors for processing to form an image; and
a computing device to control the modulator to modulate the excitation illumination temporally in a controllable, periodic spatial pattern and to control the periodic spatial pattern with respect to the laser scanning mirror pairs to enhance lateral resolution beyond a diffraction limit in the image formed based on the emission fluorescence collected from the target object by shifting high spatial frequencies in a Fourier domain into a detectable range to enhance the lateral resolution beyond the diffraction limit, wherein the computing device further controls the modulation of the excitation illumination to include a non-integer number of modulation periods to control the phase delay.

### Claim 12 (depends on 11)

The system of claim 11, wherein the modulator comprises an optical chopper.

### Claim 13 (depends on 11)

The system of claim 11, wherein the modulator is arranged with respect to at least one of a reference arm, a sample arm, and a beamsplitter.

### Claim 14 (depends on 11)

The system of claim 11, wherein the modulator further comprises a mirror arranged with respect to a reference arm to create structured interference for collection by the detector.

### Claim 15 (depends on 14)

The system of claim 14, wherein the mirror comprises at least one of a galvo mirror and a polygon mirror.

### Claim 16 (depends on 11)

The system of claim 11, wherein the modulator comprises an electro-opto modulator.

### Claim 17

The system of claim of 11, wherein the detector comprises at least one of a complementary metal oxide silicon camera and a charge coupled device camera.

### Claim 18 (depends on 17)

The system of claim 17, wherein the detector further comprises a spectrometer.

### Claim 19 (depends on 11)

The system of claim 11, further including a cube beamsplitter associated the laser scanning mirrors.
