US 9,356,238 B2 · Replication of patterned thin-film structures for use in plasmonics and metamaterials

Abstract

The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.

Claims11

Dependent claims

A method of making a patterned device, the method comprising:

providing one or more periodically distributed surface feature in a first silicon substrate to form a patterned template;
coating the patterned template with a metal to form a thin-film layer structure on the one or more periodically distributed surface feature;
coating the thin-film layer structure with a material to form an adhesive layer;
attaching a second silicon substrate to the adhesive layer;
and
separating the thin-film layer structure from the patterned template.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/578,873Filed 22 Dec 2014 · division

Priority

25 Nov 2008

Published

US 2015/0179938 A125 Jun 2015

Granted

31 May 2016

Term ends

Not estimatedThe source records don’t support an estimate.

Classification24 codes

H10N 99/05
Subject matter not provided for in other groups of this subclass: devices based on quantum mechanical effects, e.g. quantum interference devices…
B81C 1/00119
Without movable or flexible elements: arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
B81C 99/009
Manufacture of substrate-free structures: manufacturing the stamps or the moulds
B82Y 10/00
Nanotechnology for information processing, storage or transmission

Family

Application61/200,201Us provisional application · filed 25 Nov 2008

Application61/142,316Us provisional application · filed 2 Jan 2009

Application61/215,056Us provisional application · filed 1 May 2009

PCT/US2009/006255Parent of this division · filed 24 Nov 2009

US 2015/0179938 A1Pre-grant publication · published 25 Jun 2015

Application13/131,197Parent of this division

US 8,948,562 B2Parent of this division

US 2012/0161600 A1Published application

US 9,356,238 B2This patent

From the US filing history. Foreign family members aren’t listed.

Replication of patterned thin-film structures for use in plasmonics and metamaterials

Life of this patent

Replication of patterned thin-film structures for use in plasmonics and metamaterials

Life of this patent

Abstract

Claims11