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US 9,350,137 B1Granted
Laser processing method and laser processing system
OwnerKiwamu Takehisainventor
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Abstract
The disclosed invention relates to a method of realizing a laser processing system. The system relating to one aspect of the invention is provided with a processing laser, a vaporization laser, and an oscillator controller. The processing laser is a flashlamp-pumped 1.06 μm solid-state laser, a pulsed iodine laser or an oxygen molecule laser. The vaporization laser is a pulsed laser whose wavelength is longer than 1.4 μm.
Claims5
A laser processing system comprising:
- a first pulsed laser apparatus that is a pulsed iodine laser or an oxygen molecule laser;
- a second pulsed laser apparatus with a wavelength of longer than 1.4 μm;
- and
- a controller which controls oscillation timing of the first pulsed laser apparatus so that it oscillates after the second pulsed laser apparatus,
- wherein the oscillation timing of the second pulsed laser apparatus is controlled based on timing of supplying chlorine gas to a singlet oxygen generator of the oxygen molecule laser or the iodine laser.
2 more elements
A laser processing method using a first pulsed laser apparatus and a second pulsed laser apparatus;
- the method comprising:
- oscillating a pulsed laser with a wavelength of longer than 1.4 μm using the second pulsed laser apparatus;
- and
- oscillating the first pulsed laser apparatus after an oscillation timing of the second pulsed laser apparatus, the first laser apparatus being a pulsed iodine laser or an oxygen molecule laser,
- wherein the oscillation timing of the second pulsed laser apparatus is controlled based on timing of supplying chlorine gas to a singlet oxygen generator of the oxygen molecule laser or the iodine laser.
2 more elements
Dependencies are inferred from the claim text.