Methods of fabricating glass articles by laser damage and etching

A method of forming a shaped glass article, comprising:

• providing a glass substrate sheet;
• translating a pulsed laser beam on the glass substrate sheet to form a laser damage region between a first surface and a second surface of the glass substrate sheet, wherein the laser damage region comprises an initial geometry;
• reforming the glass substrate sheet to form a bend at a local area of the glass substrate sheet, wherein:
• at least a portion of the laser damage region is within the local area;
• and
• a geometry of the laser damage region changes from the initial geometry to a desired geometry following the reforming of the glass substrate sheet such that the initial geometry of the laser damage region compensates for the bending of the glass substrate sheet;
• and
• applying an etchant solution to the glass substrate sheet to remove a portion of the glass substrate sheet about the laser damage region to form the glass article.

A method of forming a shaped glass article, comprising:

• providing a glass substrate sheet;
• translating a pulsed laser beam on the glass substrate sheet to form a laser damage region extending from a first surface of the glass substrate sheet to a second surface of the glass substrate sheet, wherein:
• the laser damage region comprises a plurality of defect lines, wherein each defect line is formed at a different depth of the glass substrate;
• and
• the laser damage region comprises an initial geometry;
• submerging the glass substrate sheet in a bath of etchant solution comprising about 1M to about 3M of hydrofluoric acid and hydrochloric acid, wherein:
• a concentration of the hydrochloric acid is less than about 1M if a concentration of the hydrochloric acid is greater than about 2M;
• the concentration of the hydrochloric acid is between about 1M and about 3M if the concentration of the hydrochloric acid is less than about 2M;
• and
• agitating the bath of etchant solution until a portion of the glass substrate sheet about the laser damage region is substantially removed, thereby forming the shaped glass article.

A glass article comprising:

• a glass wafer comprising a surface with an antireflective coating;
• and
• an interposer adhered to the surface of the glass wafer comprising the antireflective coating, and comprising a plurality of through holes, wherein;
• the interposer is not chemically strengthened, and
• the interposer has a failure rate of about 50% at a force of about 5 kg measured using a ring-on-ring test.