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US 9,346,078 B2Granted
Mask frame assembly for thin film deposition
AssigneeSamsung Display Co., Ltd.
InventorsYoon-Chan Oh, Choon-Ho Lee
Life of this patent
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Abstract
A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses.
Claims23
A mask frame assembly for thin film deposition, the mask frame assembly comprising:
- a mask frame having an opening;
- and
- a mask coupled to the mask frame and comprising:
- a first surface for facing a deposition substrate;
- a second surface opposite the first surface;
- and
- a deformation prevention part comprising a plurality of first parts having a first thickness, and a plurality of second parts having a second thickness that is less than the first thickness,
- wherein the first and second parts are alternately arranged in a first direction of the mask, and are alternately arranged in a second direction of the mask that is perpendicular to the first direction.
5 more elements
Dependencies are inferred from the claim text.