Loading patent…
AssigneeBoard of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada, Reno
InventorsJesse D Adams, Steven Malekos, Nathalie Le Galloudec, Grant Korgan, Thomas Cowan, Yasuhiko Sentoku
Estimating the term…
In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 μm. In particular examples, the distance is less than about 1 μm. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.
A hemispherical target comprising a metal layer comprising a first metal layer and a second metal layer, the first and second metal layers being separated by another layer, and defining a hollow, concave inner surface having an internal apex and a distance of less than about 15 μm between two opposing points of the internal apex, the target further defining a convex outer surface and a base positioned opposite the internal apex.
A hemispherical target comprising a metal layer comprising a first metal layer comprising Au and a second metal layer comprising at least one metal selected from the group consisting of Ti, Cu, Mo, Ni, Ta, W, Pd, Pt, and Ag, and defining a hollow, concave inner surface having an internal apex and a distance of less than about 15 μm between two opposing points of the internal apex, the target further defining a convex outer surface and a base positioned opposite the internal apex.
A hemispherical target comprising a metal layer having a thickness of at least about 8 μm and defining a hollow, concave inner surface having an internal apex and a distance of less than about 15 μm between two opposing points of the internal apex, the target further defining a convex outer surface and a base positioned opposite the internal apex.
Dependencies are inferred from the claim text.