Actuator, optical scanner, and image forming apparatus
AssigneeSeiko Epson Corporation
InventorsMakiko Hino, Yasushi Mizoguchi
Life of this patent
Estimating the term…
Abstract
An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.
Claims11
An actuator comprising:
- a movable portion that swings about a swing axis;
- a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion;
- and
- a support portion that supports the connecting portion,
- wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view.
An optical scanner comprising:
- a movable portion that includes a light reflector having light reflectivity and swings about a swing axis;
- a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion;
- and
- a support portion that supports the connecting portion,
- wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view.
An image forming apparatus comprising:
- a light source that emits light;
- and
- an optical scanner that deflects light from the light source,
- wherein the optical scanner includes
- a movable portion that includes a light reflector having light reflectivity and swings about a swing axis,
- a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and
- a support portion that supports the connecting portion,
- the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view.
Dependencies are inferred from the claim text.