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US 9,341,296 B2Granted
Heater jacket for a fluid line
AssigneeASM America, Inc.
InventorsAndrew M. Yednak, III, Frederick L. Pettinger, Jr.
Life of this patent
Estimating the term…
Abstract
A heater jacket for a fluid line including a tube having an inner surface and an outer surface; a spacer disposed within the tube between the inner surface and the fluid line; and wherein the spacer includes a hole for receiving the fluid line therein and spaces the fluid line from the tube inner surface.
Claims24
A heater jacket for a fluid line comprising:
- a tube having an inner surface, an outer surface and an attachment mechanism to permit installation and removal of the tube from a fluid line by attaching free ends of the heater jacket together;
- a heating element between the inner surface and the outer surface;
- a spacer disposed within the tube between the inner surface and the fluid line configured to define a cavity between the inner surface and the fluid line, said cavity configured to allow radiant heat from the heating element to heat fluid within the fluid line and to prevent the heater jacket contacting the fluid line;
- and
- wherein the spacer includes a hole for receiving the fluid line therein and spaces the fluid line from the tube inner surface, and
- wherein the fluid line is configured to transport a fluid from a precursor source to a reaction chamber.
3 more elements
A reaction system comprising:
- a reaction chamber fluidly connected to a fluid line;
- a precursor source fluidly coupled to the fluid line;
- a heater jacket for the fluid line, the heater jacket comprising a tube having an inner surface, an outer surface and an attachment mechanism to permit installation and removal of the heater jacket from the fluid line by attaching free ends of the heater jacket together, a spacer disposed within the tube between the inner surface and the fluid line configured to prevent the heater jacket from contacting the fluid line, said cavity configured and to define a cavity between the inner surface and the fluid line, said cavity configured to allow radiant heating by the heating element of the fluid line, and a heating element between the inner surface and the outer surface;
- and
- wherein the spacer includes a hole for receiving the fluid line and spaces the fluid line from the tube inner surface.
2 more elements
A method of maintaining a fluid temperature in a semiconductor processing machine comprising the steps of:
- providing a reaction chamber in communication with a fluid line and a heater jacket surrounding at least a portion of the fluid line, wherein the heater jacket comprises a tube having an inner surface, an outer surface, a heating element, and an attachment mechanism to permit installation and removal of the heater jacket from the fluid line by attaching free ends of the heater jacket together, a spacer disposed within the tube between the inner surface and the fluid line to define a cavity between the inner surface and the fluid line to allow radiant heat from the heating element to radiantly heat the fluid line and to prevent the heating element from contacting the fluid line;
- and wherein the spacer includes a hole for receiving the fluid line and spaces the fluid line from the tube inner surface;
- powering the heating element to increase a temperature of a fluid between the fluid line and the tube;
- monitoring a temperature of the fluid line using a thermocouple mounted to the fluid line;
- and,
- controlling the temperature of the fluid between the fluid line and the tube in response to monitoring the temperature of the fluid line.
3 more elements
Dependencies are inferred from the claim text.