# US 9,335,386 B2 · Magnatoresistive component and magnatoresistive device

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- Number: US 9,335,386 B2
- Document ID: US9335386B2
- Status: Granted
- Kind: B2
- Application number: 14/262,911
- Filed: 2014-04-28
- Published: 2014-08-21
- Granted: 2016-05-10
- Earliest claimed: 2011-09-29
- Assignees: Voltafield Technology Corporation
- Applicants: Voltafield Technology Corp.
- Inventors: Nai-Chung Fu; Kuang-Ching Chen; Fu-Tai Liou
- Web page: https://patentgrep.com/patent/US9335386B2

## CPC

- G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)}
- G01R 33/09: Magnetoresistive devices
- G01R 33/096: {anisotropic magnetoresistance sensors}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A magnetoresistive component comprises a horizontal magnetoresistive layer and a nonparallel magnetoresistive layer. The horizontal magnetoresistive layer is disposed above a surface of a substrate and has a first side and a second side opposite the first side, along its extending direction. The nonparallel magnetoresistive layer is not parallel to the surface of the substrate and is physically connected to the horizontal magnetoresistive layer at the first side of the horizontal magnetoresistive layer.

## Claims

### Claim 1

A magnetoresistive component, comprising: a horizontal magnetoresistive layer, disposed above a surface of a substrate and parallel to the surface, having a first side and a second side opposite the first side, along its extending direction; a nonparallel magnetoresistive layer not parallel to the surface of the substrate and physically connected to the horizontal magnetoresistive layer at the first side of the horizontal magnetoresistive layer.

### Claim 2 (depends on 1)

The magnetoresistive component according to claim 1, wherein the resistance of the horizontal magnetoresistive layer and the nonparallel magnetoresistive layer would change according to a change of an external magnetic field.

### Claim 3 (depends on 1)

The magnetoresistive component according to claim 1, wherein the horizontal magnetoresistive layer and the nonparallel magnetoresistive layer comprise one of a ferromagnet material, an antiferromagnet material, a nonferromagnet material and a tunneling oxide or any combination thereof.

### Claim 4 (depends on 1)

The magnetoresistive component according to claim 1, wherein the nonparallel magnetoresistive layer extends upwards or downwards from the first side of the horizontal magnetoresistive layer.

### Claim 5 (depends on 1)

The magnetoresistive component according to claim 1, wherein the nonparallel magnetoresistive layer is a long strip or comprises multiple discrete sub-portions.

### Claim 6 (depends on 1)

The magnetoresistive component according to claim 1, wherein the nonparallel magnetoresistive layer is composed of a straight part and a curved part physically connecting to the horizontal magnetoresistive layer.

### Claim 7 (depends on 1)

The magnetoresistive component according to claim 1, wherein the nonparallel magnetoresistive layer is composed of a straight part and a faceted part physically connecting to the horizontal magnetoresistive layer.

### Claim 8 (depends on 1)

The magnetoresistive component according to claim 1, further comprising another nonparallel magnetoresistive layer extending upwards or downwards from the second side of the horizontal magnetoresistive layer and physically connected thereto.

### Claim 9 (depends on 1)

The magnetoresistive component according to claim 1, further comprising: a downward trench, wherein the nonparallel magnetoresistive layer is disposed on a sidewall of the downward trench and extends downward from the horizontal magnetoresistive layer.

### Claim 10 (depends on 9)

The magnetoresistive component according to claim 9, wherein the sidewall of the downward trench forms an angle with respect to the surface of the substrate and the angle is equally to or less than 90 degree.

### Claim 11 (depends on 9)

The magnetoresistive component according to claim 9, further comprising: a bottom magnetoresistive layer disposed on a bottom of the downward trench, wherein this bottom magnetoresistive layer is physically connected to the nonparallel magnetoresistive layer.

### Claim 12 (depends on 11)

The magnetoresistive component according to claim 11, wherein the bottom magnetoresistive layer completely covers the bottom of the downward trench.

### Claim 13 (depends on 11)

The magnetoresistive component according to claim 11, wherein the bottom magnetoresistive layer partially covers the bottom of the downward trench and leaves the bottom of downward trench partially uncovered.

### Claim 14 (depends on 11)

The magnetoresistive component according to claim 11, wherein a shape of the downward trench viewed in top view is oval shape, rectangular shape with rounded corners or rectangular shape with at least one jagged side.

### Claim 15 (depends on 1)

The magnetoresistive component according to claim 1, further comprising: an upward trench, wherein the horizontal magnetoresistive layer is disposed on a bottom of the upward trench while the nonparallel magnetoresistive layer is disposed on a sidewall of the upward trench and extends upwards from the first side of the horizontal magnetoresistive layer.

### Claim 16 (depends on 15)

The magnetoresistive component according to claim 15, wherein the sidewall of the upward trench forms an angle with respect to the surface of the substrate and the angle is equally to or less than 90 degree.

### Claim 17 (depends on 15)

The magnetoresistive component according to claim 15, further comprising: another nonparallel magnetoresistive layer, wherein the another nonparallel magnetoresistive layer is disposed on another sidewall of the upward trench and extends upwards from the second side of the horizontal magnetoresistive layer.

### Claim 18 (depends on 15)

The magnetoresistive component according to claim 15, wherein a shape of the upward trench viewed in top view is oval shape, rectangular shape with rounded corners or rectangular shape with at least one jagged side.

### Claim 19 (depends on 1)

The magnetoresistive component according to claim 1, further comprising: a first downward trench at the first side of the horizontal magnetoresistive layer and a second downward trench at the second side of the horizontal magnetoresistive layer; another nonparallel magnetoresistive layer physically connected to the horizontal magnetoresistive layer, wherein the nonparallel magnetoresistive layer is disposed on a sidewall of the first downward trench and extends downwards from the first side while the another nonparallel magnetoresistive layer is disposed on a sidewall of the second downward trench and extends downwards from the second side.

### Claim 20 (depends on 1)

The magnetoresistive component according to claim 1, wherein a thickness of at least a portion of the nonparallel magnetoresistive layer on the sidewall of the downward or upward trench is thicker than that of the horizontal magnetoresistive layer.

### Claim 21 (depends on 20)

The magnetoresistive component according to claim 20, wherein the nonparallel magnetoresistive layer on the sidewall of the downward or upward trench comprises a back part formed as a spacer on the sidewall and a front part as an extension of the horizontal magnetoresistive layer.

### Claim 22 (depends on 1)

The magnetoresistive component according to claim 1, further comprising: a downward trench having a bottom, multiple sides and multiple turns joining adjacent sides, wherein each of the bottom, sidewalls of the multiple sides and sidewalls of the multiple turns is designed to be covered, partially covered or uncovered by an extension of the horizontal magnetoresistive layer separately and independently.

### Claim 23

A xMR device comprising a magnetoresistive component, the magnetoresistive component comprising: a horizontal magnetoresistive layer, disposed above a surface of a substrate and substantially parallel to the surface, having a first side and a second side opposite the first side, along its extending direction; a nonparallel magnetoresistive layer not parallel to the surface of the substrate and physically connected to the horizontal magnetoresistive layer at the first side of the horizontal magnetoresistive layer.
