Side-channel compressor with symmetric rotor disc which pumps in parallel
AssigneeEdwards Limited
InventorNigel Paul Schofield
Life of this patent
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Abstract
A pump comprising a regenerative pumping mechanism having a generally disc-shaped rotor mounted on an axial shaft for rotation relative to a stator. The rotor has first and second surfaces each having a series of shaped recesses formed in concentric circles thereon, and a stator channel formed in a surface of the stator which faces one of the rotor's first or second surfaces. The rotor divides the a gas flow path into sub-flow paths such that gas can flow towards the outlet simultaneously along both the first surface and the second surface of the rotor.
Claims16
A regenerative pump rotor generally disc-shaped and mounted onto an axial shaft supporting a second rotor for rotation relative to a stator, the pump rotor comprising a first material coated by a second material to produce first and second surfaces each having a series of shaped recesses formed in concentric circles thereon and being configured to face a stator channel formed in a surface of the stator, the pump rotor comprising an axial gas bearing rotor component arranged to cooperate with a gas bearing stator component for controlling an axial running clearance between the pump rotor and the stator and for providing axial support to the second rotor, wherein, during use a gas flow path extends between an inlet and an outlet of a vacuum pump and the gas flow path is divided by the pump rotor into sub-flow paths such that gas is pumped by the rotor towards the outlet simultaneously along the second material of the first and second surfaces and wherein the second material is any one of a nickel PTFE matrix, anodised aluminium, a carbon-based material, or combination thereof.
A pump comprising a regenerative pumping mechanism which comprises a generally disc-shaped pump rotor mounted on an axial shaft for rotation relative to a stator, and a second rotor mounted on the axial shaft, the pump rotor comprising a first material coated by a second material to produce first and second surfaces each having a series of shaped recesses formed in concentric circles thereon, the pump rotor comprising an axial gas bearing rotor component arranged to cooperate with a gas bearing stator component for controlling an axial running clearance between the pump rotor and the stator and for providing axial support to the second rotor, wherein each of the concentric circles is aligned with a portion of a stator channel formed in a surface of the stator, and wherein a gas flow path extends between an inlet and an outlet of the pump such that the pump rotor divides the gas flow path into sub-flow paths such that gas can flow towards the outlet simultaneously along the second material of both the first and the second surface of the pump rotor, wherein the second material is any one of a nickel PTFE matrix, anodised aluminium, a carbon-based material, or combination thereof.
Dependencies are inferred from the claim text.